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专利名称：METHOD AND ITS APPARATUS FOR
DETECTING DEFECTS
发明人：Minoru YOSHIDA,Shunji Maeda申请号：US12946555申请日：20101115
公开号：US201100579A1公开日：20110310
专利附图：
摘要：In the present invention, to make corrective matching thereof, it is designed asfollows; position effect of defects coordinates, which are output from an inspectionapparatus, is allowed, coordinates of inspected data are mutually corrected, and a state
of coincidence or non-coincidence among a plurality sets of inspected data is output ordisplayed. Inspection data is designed to include kinds, kinds difference and dimension ofdefects. A state of coincidence or non-coincidence between inspected data is designed tobe output or displayed appropriately, by kinds or dimensions, or by a grouping thereof,of a defects object. The same sample is inspected by every time of passing a productionstep, and a state of data increase or decrease, or coincidence or non-coincidence betweenthe inspected data is designed to be output or displayed.
申请人：Minoru YOSHIDA,Shunji Maeda
地址：Yokohama JP,Yokohama JP
国籍：JP,JP
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