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专利名称：MEMS and method of manufacturing MEMS发明人：Sadeg M. Faris申请号：US10793653申请日：20040304公开号：US07081657B2公开日：20060725
专利附图：
摘要：The present invention relates to micro electro-mechanical systems (MEMS) andproduction methods thereof, and more particularly to vertically integrated MEMSsystems. Manufacturing of MEMS and vertically integrated MEMS is facilitated by
forming, preferably on a wafer level, plural MEMS on a MEMS layer selectively bonded to
a substrate, and removing the MEMS layer intact.
申请人：Sadeg M. Faris
地址：Pleasantville NY US
国籍：US
代理人：Ralph J. Crispino
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