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专利名称：METHOD AND APPARATUS FOR THE
PREPARATION OF SILANES
发明人：Juergen Erwin LANG,Hartwig
RAULEDER,Ekkehard MUEH
申请号：US14782247申请日：20140228
公开号：US201600493A1公开日：20160218
摘要：The invention relates to a process for preparing dimeric and/or trimeric silanesby conversion of monosilane in a plasma and to a plant for performance of the process.
申请人：EVONIK DEGUSSA GMBH
地址：Essen DE
国籍：DE
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