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专利名称：Film thickness measuring method and device
therefor
发明人：Nagao, Toshishige Mitsubishi Denki K.
K.,Ariki, Masayuki Mitsubishi Denki KabushikiKaisha,Ida, Yoshiaki c/o Mitsubishi DenkiKabushiki
申请号：EP87106214.7申请日：19870429公开号：EP02507B1公开日：19930303
摘要：A film thickness measuring method and device therefor which are free fromdrawbacks caused by errors in a sheet conveying system and an optical system of thedevice and the like. The optical system is moved over a sheet (3) having a sheet memberand a film formed thereon, whose thickness is to be measured, so that the deformationof the conveying system and the optical system is detected in advance. After taking thedetection results into account, the thickness measurement is carried out resulting inimproving accuracy thereof.
申请人：MITSUBISHI DENKI KABUSHIKI KAISHA
地址：2-3, MARUNOUCHI 2-CHOME CHIYODA-KU; TOKYO 100
代理机构：Lehn, Werner, Dipl.-Ing.
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